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专利名称：MEMS device and method of manufacturing
the same
发明人：Shingo Uchiyama,Fusao Shimokawa,Tomomi
Sakata,Nobuhiro Shimoyama,MitsuhiroMakihara,Mitsuo Usui
申请号：US12918783申请日：20090302公开号：US08482843B2公开日：20130709
专利附图：
摘要：A MEMS device includes a mirror substrate (), an electrode substrate () arranged
so as to face the mirror substrate (), a mirror () serving as a movable member rotatablysupported in an opening portion of the mirror substrate () via support members, a drivingelectrode () arranged on an insulating film () on a surface of the electrode substrate ()facing the mirror substrate () so as to face the mirror () across a gap and drive the mirror(), and a lower electrode () made of a metal or a semiconductor and formed under theinsulating film () exposed to the gap so as to be in contact with the insulating film ().
申请人：Shingo Uchiyama,Fusao Shimokawa,Tomomi Sakata,NobuhiroShimoyama,Mitsuhiro Makihara,Mitsuo Usui
地址：Kanagawa JP,Kanagawa JP,Kanagawa JP,Kanagawa JP,Kanagawa JP,Kanagawa JP
国籍：JP,JP,JP,JP,JP,JP
代理机构：Blakely, Sokoloff, Taylor & Zafman LLP
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