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专利名称：Scheduler for processing system发明人：Maarten Brak,Tom A. van Kesteren申请号：US136101申请日：20121129公开号：US09146551B2公开日：20150929
专利附图：
摘要：A semiconductor processing system that includes a controller is disclosed. Thecontroller may be configured to schedule the operation of the system. The controllermay be programmed to determine a current state of the system. The current state maybe defined at least by a location of one or more substrates and a processing status of
the one or more substrates. The controller may be further programmed to generate asearch tree having one or more branches. Each branch may identify one or more
subsequent actions or branch pathways capable of being performed by the system in thecurrent state. Further, the controller may be programmed to score each branch pathwayof the generated search tree. The controller may be programmed to select a branchpathway and provide instructions to perform the actions in that branch pathway based atleast in part on the score of the branch pathway.
申请人：ASM IP Holding B.V.
地址：Almere NE
国籍：NE
代理机构：Knobbe, Martens, Olson & Bear LLP
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